چکیده انگلیسی:
Using DC-Plasma Enhanced Chemical Vapour Deposition (PECVD) system, the impact of pure Co on the growth of diamond-like carbon (DLC) nano-structures were investigated. In this study, Acetylene (C2H2) was diluted in H2 and used as the reaction gas and Cobalt (Co) nano-particles were used as the catalyst. The effect of preparing Co catalyst at temperatures of 240°C and 350°C and growth conditions was studied. The results showed that the Co catalyst sputtering at 350°C temperature has a significant impact on purity, morphology, and synthesized diamond-like carbon nano-structures. This research was conducted to investigate the effect of catalyst preparation and growth conditions. Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy were used to characterize the diamond-like carbon nano-structures produced under different conditions.
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